LAM 715-011126-001 BRACKET ENCODER
LAM 715-011213-001 PLATE, VENT PORT 90DEG LOADLOCK
LAM 715-011214-001 PLATE VENT PORT 180DEG
LAM 715-011229-003 PLATE, SEAL, EXIT LOADLOCK
LAM 715-011420-001 PLATE
LAM 715-011492-005 HOLDER WAFER 5"
LAM 715-011502-001 COOLING RING
早些时候，没有PLC或者PLC价格比较昂贵的时候，逻辑控制基本上是使用继电器和接触器来完成的。继电器或者接触器就是一个线圈加几路常开或者常闭触点，利用线圈和触点之间的自保和互锁来组合各种复杂的工业控制逻辑，比如机床控制，要启动电机正反转，要实现各个轴之间互相配合，要开启冷些液体循环泵，要让驱动器启停，都要用大量的继电器。逻辑分为组合逻辑和时序逻辑，继电器实现组合逻辑容易，但是实现时序逻辑就有点困难了，毕竟时间继电器是比较粗糙的。
LAM 715-011504-001 BAFFLE, UPPER
LAM 715-011521-001 BRACKET POU GAS FILTER
LAM 715-011531-009 ELECTRODE, ANODIZED
LAM 715-011531-011 ELECTRODE, ALUMINUM, ANODIZED
LAM 715-011531-014 ELECTRODE, AL, UPPER
LAM 715-011531-014 ELECTRODE, AL, UPPER
LAM 715-011531-016 UPPER ELECTRODE
LAM 715-011531-102 ELECTRODE, UPPER, ANOD
LAM 715-011532-006 (R)PLATE UPPER SEAL
LAM 715-011559-262 WAFER CLAMP
LAM 715-011565-001 BOLT, CLAMP RETAINING
LAM 715-011565-003 BOLT
LAM 715-011570-001 SHIELD
LAM 715-011582-001 BAFFLE PLATE, LOWER AL
LAM 715-011590-001 PLATE,LOWER BAFFLE 6
LAM 715-011593-002 PLATE,SEAL,4420
LAM 715-011597-001 5MIL ELECTRODE AL AN
LAM 715-011613-002 BAR, STOP
LAM 715-011626-001 RING, COOLING LOWER ELECTRODE
LAM 715-011630-001 ELECTRODE , BOTTOM
LAM 715-011630-001 ELECTRODE , BOTTOM
LAM 715-011639-008 CAP, ELECTRODE, LOWER, 4400
LAM 715-011639-508 CAP, LWR, ROUGH, 858STR
LAM 715-011640-006 RING, AL-ANDZ LWR FOCUS ELCTD
LAM 715-011664-006 ELCTRD, LWR CAP, 6-IN NO ANDZ FLAT AL
LAM 715-011665-006 ANODE
LAM 715-011669-006 ELCTRD, LWR DOMED W/OUT PINS, AL
LAM 715-011746-142 PLATE, 4" .010 DOME REDUCED HGT
LAM 715-011823-001 ROD-MECHANICAL STOP 8.50
LAM 715-011825-001 LOWER CHAMBER PLATE
LAM 715-011858-001 PLATE WINDOW END POINT DET
LAM 715-011902-001 BAFFLE PLATE
PLC是通过执行程序实现控制的。当控制要求发生改变时，只要修改程序即可，*大限度地缩短了工艺更新所需要的时间。PLC的产品已标准化、系列化、模块化，而且PLC及配套产品的模块品种多，用户可以灵活方便地进行系统配置组合成各种不同规模、不同功能的控制系统。在PLC控制系统中，只需在PLC的端子上接入相应的输入/输出信号线即可，不需要进行大量且复杂的硬接线，并且PLC有较强的带负载能力，可以直接驱动一般的电磁阀和交流接触器。
LAM 715-011909-501 ELECTRODE, SI, CAPTIVE
LAM 715-011912-555 BAFFLE, UPPER, 4420, STR,858
LAM 715-011912-555 BAFFLE, UPPER, 4420, STR,858
LAM 715-011913-083 PLATE, BAFFLE LOWER
LAM 715-011913-083 PLATE, BAFFLE LOWER
LAM 715-011913-501 BAFFLE, LOWER
LAM 715-011913-555 BAFFLE, LOWER, 4420,STR,858
LAM 715-012025-001 SPACER 0-RING
LAM 715-012101-008 HOLDER,W/F 8",ARM EXIT
LAM 715-012111-002 COVER ARM HSG (CABLE DRIVE)
LAM 715-012126-001 TUBE ARM DRIVE
LAM 715-012165-005 5"HOLDER WAFER 5" TIGHT POC
LAM 715-012165-008 ARM, TIGHT POCKET ELL
LAM 715-012223-001 SHAFT GROVVED INNER PLATE
LAM 715-012233-002 GATE-HARD ANODIZE INNER
LAM 715-012243-001 BLOCK LATCH
LAM 715-012245-001 PIVOT, GATE, INNER
LAM 715-012251-001 BAR LATCH SOLENOID RELEASE
LAM 715-012254-001 BEARING, LATCH SOLENOID RELEASE
LAM 715-012322-001 OUTER DOOR FOR GATE DRIVE
LAM 715-013295-001 HSG,ADJ, WFR LIFT
LAM 715-013477-001 PLATE, MOUNTING
LAM 715-013718-006 CHUCK SPINNER 6"
LAM 715-013718-016 ASSY ELECTRODE
LAM 715-013772-001 COLLAR PINNED LIFTER 6"(462
LAM 715-014074-002 BLOCK MTG , GAS NOZZLE
LAM 715-014556-031 GASKET,ORIFICE
LAM 715-015092-001 BLOCK,THREADED,SEED
LAM 715-015216-001 TUBE ADAPTER
LAM 715-0166-001 CYLINDER, ARM-AIR
LAM 715-018611-117 CAP, LWR, ELECTRODE, 8"
LAM 715-018906-002 ELECTRODE, BOTTOM, BELLOW
LAM 715-018917-001 HOLDER,W/F CLAMP(462
LAM 715-018991-006 ELECTRODE, ALUMINUM, ANODIZED
LAM 715-019939-002 TUBE,MANF TO MCRWV SOURCE
LAM 715-019940-002 TUBE,MANF FROM MCRWV SOURCE
LAM 715-019942-002 TUBE,MANF TO MCRWV VLVE FROM G
LAM 715-019943-001 TUBE,MANF TO TEE FROM CHMBR
LAM 715-019944-004 TUBE,VLV TO TEE TO CHMBR
LAM 715-019945-002 TUBE,VLV TO CHMBR
LAM 715-021092-001 SPACER
LAM 715-021274-008 CAP, LOWER ELECTRODE 8IN
LAM 715-021400-002 COVER, 180 DEG LOADLOCK, P.S. MOD
LAM 715-021507-1 CONNECTOR,MALE,VCR,MOD.
LAM 715-021719-001 COVER BELL JAR ISO ETCH
LAM 715-024347-100 PLATE,SPRT,V65,V65A,V75,V75A
LAM 715-025106-001 PLATE- LOWER BAFFLE, ESC
LAM 715-028087-005 SHROUD HARD ANODIZED
LAM 715-028420-001 CAP, L ELECTRODE FLAT PROCESS
LAM 715-028486-001 PLATE UPPER SEAL 6' ELECTRODE
LAM 715-028559-001 SHOWER HEAD 6" 4620
LAM 715-028616-001 PLATE LOWER BAFFLE 8" BOLTED
LAM 715-028620-001 PROBE, THERMAL WELL
LAM 715-028735-001 TRIPPLE BAFFLE, UPPER 852
LAM 715-028852-001 RING,CLAMP UPPER